Subwavelength photolithography based on surface-plasmon polariton resonance
نویسندگان
چکیده
منابع مشابه
Subwavelength photolithography based on surface-plasmon polariton resonance.
The use of surface-plasmon polariton (SPP) resonance in the optical near field of a metallic mask to produce fine patterns with a resolution of subwavelength scale is proposed. Preliminary numerical simulations indicate that the critical resolution is mainly determined by the thickness of the metallic mask. The surface of the metallic mask on the illuminated side collects light through SPP coup...
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In this study, we present experimentally measured transmission enhancement of microwaves through periodic slit arrays in metallic films. Enhanced transmission peaks and sharp transmission dips are clearly observed around the theoretically expected surface plasmon polariton(SPP) resonance frequencies. Dependence of the transmittance spectra on the geometrical properties of slits is also demonstr...
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We report on realization of channel plasmon-polariton (CPP) propagation along a subwavelength metal groove. Using imaging with a near-field microscope and end-fire coupling with a tapered fiber connected to a tunable laser at telecommunication wavelengths (1425-1620 nm), we demonstrate low-loss (propagation length approximately 100 microm) and well-confined (mode width approximately 1.1 microm)...
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ژورنال
عنوان ژورنال: Optics Express
سال: 2004
ISSN: 1094-4087
DOI: 10.1364/opex.12.003055